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research article
Miniaturized, focusing fan-out elements: design, fabrication and characterization
We present miniaturized, focusing fan-out elements. The new micro-optical elements were fabricated using different technologies: double-sided injection moulding in polycarbonate, double-sided photolithography with subsequent transfer in quartz and direct laser writing in photoresist. The fan-out elements were characterized by measuring their efficiency and uniformity, the surface profiles of the microlenses were measured with a Twyman-Green interferometer. The overall performance of the combined, hybrid elements is demonstrated with intensity distributions recorded in the focal planes.
Type
research article
Authors
Publication date
1999
Published in
Volume
1
Start page
244
End page
248
Peer reviewed
REVIEWED
Written at
OTHER
EPFL units
Available on Infoscience
April 22, 2009
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