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conference poster not in proceedings
Two-wavelength grating interferometry for extended range MEMS metrology
Toy, M. F.
•
Ferhanoglu, O.
•
Urey, H.
2007
Diffraction gratings integrated with MEMS has many applications as they can offer shot noise limited sub-nm displacement detection sensitivities but are limited in range. A two-wavelength readout method is developed that maintains high sensitivity while increasing the detection range from 105nm to 1.7um assuming sensitivity is maintained at > 50% of the maximum sensitivity.
Type
conference poster not in proceedings
Authors
Toy, M. F.
•
Ferhanoglu, O.
•
Urey, H.
Publication date
2007
EPFL units
Event name | Event place | Event date |
Hualien, TAIWAN | Aug 12-16, 2007 | |
Available on Infoscience
January 21, 2011
Use this identifier to reference this record