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  4. Two-wavelength grating interferometry for extended range MEMS metrology
 
conference poster not in proceedings

Two-wavelength grating interferometry for extended range MEMS metrology

Toy, M. F.
•
Ferhanoglu, O.
•
Urey, H.
2007
IEEE/LEOS International Conference on Optical MEMS and Nanophotonics

Diffraction gratings integrated with MEMS has many applications as they can offer shot noise limited sub-nm displacement detection sensitivities but are limited in range. A two-wavelength readout method is developed that maintains high sensitivity while increasing the detection range from 105nm to 1.7um assuming sensitivity is maintained at > 50% of the maximum sensitivity.

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Type
conference poster not in proceedings
Author(s)
Toy, M. F.
Ferhanoglu, O.
Urey, H.
Date Issued

2007

Subjects

optical sensing

•

grating interferometry

•

MEMS metrology

Written at

EPFL

EPFL units
IMT  
Event nameEvent placeEvent date
IEEE/LEOS International Conference on Optical MEMS and Nanophotonics

Hualien, TAIWAN

Aug 12-16, 2007

Available on Infoscience
January 21, 2011
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/63220
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