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research article

Microfabrication of a combined AFM-SNOM sensor

Schürmann, G.
•
Noell, W.  
•
Staufer, U.
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2000
Ultramicroscopy

The objective of this work is to fabricate a scanning probe sensor that combines the well-established method for atomic force microscopy, employing a micro-machined Si cantilever and integrated tip, with a probe for the optical near field. A photosensitive pn-junction is integrated into the tip for that purpose and an Al coating is applied to the tip. It comprises an aperture of 50-70 nm in diameter at the apex of the tip in order to spatially limit the interaction of the tip to the optical near field of the sample. Characterization of the tip and first results of simultaneously recorded force and photon images are presented. (C) 2000 Elsevier Science B.V. | The objective of this work is to fabricate a scanning probe sensor that combines the well-established method for atomic force microscopy, employing a micro-machined Si cantilever and integrated tip, with a probe for the optical near field. A photosensitive pn-junction is integrated into the tip for that purpose and an Al coating is applied to the tip. It comprises an aperture of 50-70 nm in diameter at the apex of the tip in order to spatially limit the interaction of the tip to the optical near field of the sample. Characterization of the tip and first results of simultaneously recorded force and photon images are presented.

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Type
research article
DOI
10.1016/S0304-3991(99)00122-9
Author(s)
Schürmann, G.
•
Noell, W.  
•
Staufer, U.
•
de Rooij, N. F.  
Date Issued

2000

Published in
Ultramicroscopy
Volume

82

Issue

1-4

Start page

33

End page

38

Note

240

Peer reviewed

REVIEWED

Written at

OTHER

EPFL units
SAMLAB  
Available on Infoscience
May 12, 2009
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/39846
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