Repository logo

Infoscience

  • English
  • French
Log In
Logo EPFL, École polytechnique fédérale de Lausanne

Infoscience

  • English
  • French
Log In
  1. Home
  2. Academic and Research Output
  3. Journal articles
  4. Ultra-smooth silicon nitride waveguides based on the Damascene reflow process: fabrication and loss origins
 
research article

Ultra-smooth silicon nitride waveguides based on the Damascene reflow process: fabrication and loss origins

Pfeiffer, MHP
•
Liu, JQ
•
Raja, AS
Show more
2018
OPTICA
  • Details
  • Metrics
Type
research article
DOI
10.1364/OPTICA.5.000884
Web of Science ID

WOS:000439429000019

Author(s)
Pfeiffer, MHP
Liu, JQ
Raja, AS
Morais, T
Ghadiani, B
Kippenberg, TJ
Date Issued

2018

Published in
OPTICA
Volume

5

Issue

7

Start page

884

End page

892

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
LPQM  
Available on Infoscience
November 8, 2018
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/151177
Logo EPFL, École polytechnique fédérale de Lausanne
  • Contact
  • infoscience@epfl.ch

  • Follow us on Facebook
  • Follow us on Instagram
  • Follow us on LinkedIn
  • Follow us on X
  • Follow us on Youtube
AccessibilityLegal noticePrivacy policyCookie settingsEnd User AgreementGet helpFeedback

Infoscience is a service managed and provided by the Library and IT Services of EPFL. © EPFL, tous droits réservés