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  4. MEMS Fabrication based on Epitaxial Piezoelectric Thin Films on Silicon
 
conference paper

MEMS Fabrication based on Epitaxial Piezoelectric Thin Films on Silicon

Gariglio, S.
•
Stucki, N.
•
Triscone, J.-M.
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2008
Workshop on Oxide Electronics 15
  • Details
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Type
conference paper
Author(s)
Gariglio, S.
•
Stucki, N.
•
Triscone, J.-M.
•
Isarakorn, D.  
•
Briand, D.  
•
de Rooij, N. F.  
•
Baek, S.-H.
•
Eom, C.-B.
•
Reiner, J. W.
•
Ahn, C. H.
Date Issued

2008

Published in
Workshop on Oxide Electronics 15
Editorial or Peer reviewed

NON-REVIEWED

Written at

OTHER

EPFL units
SAMLAB  
Available on Infoscience
May 12, 2009
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/39272
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