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High Fill-Factor Arrays of Flexure-Hinge Type Micromirrors for Multi Object Spectroscopy
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conference paper
High Fill-Factor Arrays of Flexure-Hinge Type Micromirrors for Multi Object Spectroscopy
Waldis, S.
•
Clerc, P.-A.
•
Noell, W.
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2006
IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference
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