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  4. High Fill-Factor Arrays of Flexure-Hinge Type Micromirrors for Multi Object Spectroscopy
 
conference paper

High Fill-Factor Arrays of Flexure-Hinge Type Micromirrors for Multi Object Spectroscopy

Waldis, S.
•
Clerc, P.-A.
•
Noell, W.  
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2006
IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference
  • Details
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Type
conference paper
DOI
10.1109/OMEMS.2006.1708258
Author(s)
Waldis, S.
•
Clerc, P.-A.
•
Noell, W.  
•
Zickar, M.
•
de Rooij, N. F.  
•
Zamkostian, F.
Date Issued

2006

Published in
IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference
Start page

48

End page

49

Editorial or Peer reviewed

NON-REVIEWED

Written at

OTHER

EPFL units
SAMLAB  
Available on Infoscience
May 12, 2009
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/40006
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