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Schürmann, G.
•
Indermühle, P.-F.
•
Staufer, U.
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1999
Surface and Interface Analysis

Micromachined SPM probes with sub-100 nm features at tip apex

research article
Type
research article
DOI
10.1002/(SICI)1096-9918(199905/06)27:5/6<299::AID-SIA510>3.0.CO;2-V
Author(s)
Schürmann, G.
•
Indermühle, P.-F.
•
Staufer, U.
•
de Rooij, N. F.  
Date Issued

1999

Published in
Surface and Interface Analysis
Volume

27

Start page

299

End page

301

Note

204

Peer reviewed

REVIEWED

Written at

OTHER

EPFL units
SAMLAB  
Available on Infoscience
May 12, 2009
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/39844