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research article

Atomistic models of the Si(100)-SiO2 interface: structural, electronic and dielectric properties

Giustino, Feliciano  
•
Bongiorno, Angelo  
•
Pasquarello, Alfredo  orcid-logo
May 13, 2005
Journal of Physics: Condensed Matter

We review the structural, electronic and dielectric properties of atomistic models of the Si(100)-SiO2 interface, which have been purposely designed in order to match a large variety of atomic-scale experimental data. After describing the generation procedure and the structural properties of two specific interface models, we study the corresponding electronic structure and dielectric response within the framework of density-functional theory. Particular emphasis is given to a systematic comparison between the atormstic properties of our model interfaces and experiment. Besides. synthesizing the present status of our experimental knowledge on the Si(100)-SiO2 interface, these models provide a solid and necessary basis for future investigations in the area of gate stacks for Si-based microelectronics.

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Type
research article
DOI
10.1088/0953-8984/17/21/003
Web of Science ID

WOS:000230247000004

Author(s)
Giustino, Feliciano  
Bongiorno, Angelo  
Pasquarello, Alfredo  orcid-logo

EPFL

Date Issued

2005-05-13

Published in
Journal of Physics: Condensed Matter
Volume

17

Issue

21

Start page

S2065

End page

S2074

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
CSEA  
Available on Infoscience
February 24, 2026
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/43484.2
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