Loading...
research article
Integrating optics and micro-mechanics in a single substrate: a step toward monolithic integration in fused silica
2005
We present a novel optical sensor concept that merges integrated optics and micro-mechanics in a monolithic substrate. This concept pushes microsystems integration and defines a new class of monolithic optical microsystems where only optical signals are processed. As an illustration, we present a high-precision, monolithic, glass-based, micro-displacement sensor. Our displacement sensor is made out of a single piece of glass through a two-step process based on femtosecond laser illumination followed by chemical etching.
Type
research article
Authors
Publication date
2005
Publisher
Published in
Volume
13
Issue
17
Start page
6635
End page
6644
Peer reviewed
REVIEWED
EPFL units
Available on Infoscience
July 20, 2015
Use this identifier to reference this record