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  4. High performance amorphous Zn-Sn-O: impact of composition, microstructure, and thermal treatments in the optoelectronic properties
 
conference paper

High performance amorphous Zn-Sn-O: impact of composition, microstructure, and thermal treatments in the optoelectronic properties

Morales-Masis, Monica
•
Rucavado, Esteban
•
Jeangros, Quentin  
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Teherani, Fh
•
Look, Dc
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2017
Oxide-Based Materials And Devices Viii
8th Conference on Oxide-Based Materials and Devices VIII

Zinc and tin oxides are both earth-abundant materials with demonstrated applicability as electrodes in several optoelectronic devices. The presence of grain boundaries in these polycrystalline films generally limits the electron mobility. By a combinatorial study of ZnO and SnO2, a transparent conducting amorphous zinc tin oxide (ZTO) electrode, free of grain boundaries, with a dense (void-free) microstructure has been developed. We show how tuning the stoichiometry (Zn4.5Sn30.2O65.3) and film's microstructure during sputtering deposition, allows achieving electron mobilities up to 25 cm(2)/Vs and free carrier concentrations of similar to 7 x 10(19) cm(-3). The effects of post-deposition thermal treatments are furthermore studied. The ZTO films keep their dense amorphous microstructure upon annealing up to 500 degrees C, as confirmed by cross-section TEM and XRD, while presenting a clear improvement in electron mobility up to 35 cm(2)/Vs when annealed in oxygen-rich atmospheres.

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Type
conference paper
DOI
10.1117/12.2252603
Web of Science ID

WOS:000405598700005

Author(s)
Morales-Masis, Monica
Rucavado, Esteban
Jeangros, Quentin  
Landucci, Federica  
Hessler-Wyser, Aicha  
Ballif, Christophe  
Editors
Teherani, Fh
•
Look, Dc
•
Rogers, Dj
•
Bozovic, I
Date Issued

2017

Publisher

Spie-Int Soc Optical Engineering

Publisher place

Bellingham

Published in
Oxide-Based Materials And Devices Viii
ISBN of the book

978-1-5106-0651-7

978-1-5106-0652-4

Total of pages

6

Series title/Series vol.

Proceedings of SPIE

Volume

10105

Start page

101050D

Subjects

Zinc tin oxide

•

amorphous TCOs

•

carrier transport

•

microstructure

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
PV-LAB  
Event nameEvent placeEvent date
8th Conference on Oxide-Based Materials and Devices VIII

San Francisco, CA

JAN 29-FEB 01, 2017

Available on Infoscience
September 5, 2017
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/140374
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