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research article

SOI Hall cells design selection using three-dimensional physical simulations

Paun, Maria-Alexandra
•
Udrea, Florin
2014
JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS

The main characteristics of Hall Effect Sensors, based on "silicon-on-insulator" (SOI) structure in the ideal design features, are evaluated by performing three-dimensional physical simulations. A particular Hall shape reproducing an XFAB SOI XI10 integration process is analyzed in details. In order to assess the performance of the considered Hall cell, the Hall voltage, absolute sensitivity and input resistance were extracted through simulations. Electrostatic potential distribution and Hall mobility were also produced through simulations for the considered SOI Hall Basic cell. A comparison between the performance of the same Hall cell manufactured in regular bulk and SOI CMOS technology respectively is given. © 2014 Elsevier B.V.

  • Details
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Type
research article
DOI
10.1016/j.jmmm.2014.07.062
Author(s)
Paun, Maria-Alexandra
Udrea, Florin
Date Issued

2014

Publisher

Elsevier

Published in
JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS
Volume

372

Start page

141

End page

146

Subjects

Hall cells

•

SOI technology

•

Device design

•

Geometry optimization

•

Three-dimensional physical simulations

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
STI  
Available on Infoscience
November 17, 2016
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/131150
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