Repository logo

Infoscience

  • English
  • French
Log In
Logo EPFL, École polytechnique fédérale de Lausanne

Infoscience

  • English
  • French
Log In
  1. Home
  2. Academic and Research Output
  3. Journal articles
  4. Effective quality factor tuning mechanisms in micromechanical resonators
 
Loading...
Thumbnail Image
review article

Effective quality factor tuning mechanisms in micromechanical resonators

Miller, James M. Lehto
•
Ansari, Azadeh
•
Heinz, David B.
Show more
December 1, 2018
Applied Physics Reviews

Quality factor (Q) is an important property of micro- and nano-electromechanical (MEM/NEM) resonators that underlie timing references, frequency sources, atomic force microscopes, gyroscopes, and mass sensors. Various methods have been utilized to tune the effective quality factor of MEM/NEM resonators, including external proportional feedback control, optical pumping, mechanical pumping, thermal-piezoresistive pumping, and parametric pumping. This work reviews these mechanisms and compares the effective Q tuning using a position-proportional and a velocity-proportional force expression. We further clarify the relationship between the mechanical Q, the effective Q, and the thermomechanical noise of a resonator. We finally show that parametric pumping and thermal-piezoresistive pumping enhance the effective Q of a micromechanical resonator by experimentally studying the thermomechanical noise spectrum of a device subjected to both techniques. (C) 2018 Author(s).

  • Details
  • Metrics
Type
review article
DOI
10.1063/1.5027850
Web of Science ID

WOS:000454617500019

Author(s)
Miller, James M. Lehto
•
Ansari, Azadeh
•
Heinz, David B.
•
Chen, Yunhan
•
Flader, Ian B.
•
Shin, Dongsuk D.
•
Villanueva, L. Guillermo  
•
Kenny, Thomas W.
Date Issued

2018-12-01

Published in
Applied Physics Reviews
Volume

5

Issue

4

Article Number

041307

Subjects

Physics, Applied

•

Physics

•

force microscope cantilevers

•

resolved-side-band

•

parametric amplification

•

back-action

•

thermal noise

•

ultrasonic-attenuation

•

cavity optomechanics

•

mems implementation

•

factor enhancement

•

self-oscillation

Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
NEMS  
Available on Infoscience
January 23, 2019
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/153843
Logo EPFL, École polytechnique fédérale de Lausanne
  • Contact
  • infoscience@epfl.ch

  • Follow us on Facebook
  • Follow us on Instagram
  • Follow us on LinkedIn
  • Follow us on X
  • Follow us on Youtube
AccessibilityLegal noticePrivacy policyCookie settingsEnd User AgreementGet helpFeedback

Infoscience is a service managed and provided by the Library and IT Services of EPFL. © EPFL, tous droits réservés