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  4. A formula for the admittance of laterally excited bulk wave resonators (XBARs)
 
research article

A formula for the admittance of laterally excited bulk wave resonators (XBARs)

Plessky, Victor
•
Kuecuek, Seniz
•
Yandrapalli, Soumya  
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July 26, 2021
Electronics Letters

The recently invented laterally excited bulk wave resonators (XBARs) demonstrate outstanding parameters suitable for the design of low loss filters for the fifth generation of mobile phones. The operation of XBARs can be interpreted as an excitation of anti-symmetric Lamb mode A1 by the interdigital transducer. However, it can also be seen as the generation of fundamental plate resonances in a set of parallelly connected quasi-independent resonators, excited by a lateral electric field created by narrow electrodes with alternating polarity. By exploiting this latter interpretation, we propose a formula for the admittance of multi-layered membranes, including the main piezoelectric layer of suitable orientation and different additional dielectric layers on both sides of the membranes. The structure can be asymmetric and the excitation of all shear wave thickness resonances, not only with odd numbers, is described. The formula can be used for the one-dimensional modelling and optimisation of XBARs and the estimation of the resonance frequency dependence on the deposited trimming thin layers.

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Type
research article
DOI
10.1049/ell2.12261
Web of Science ID

WOS:000679423600001

Author(s)
Plessky, Victor
•
Kuecuek, Seniz
•
Yandrapalli, Soumya  
•
Villanueva, Luis Guillermo  
Date Issued

2021-07-26

Publisher

WILEY

Published in
Electronics Letters
Volume

57

Issue

20

Start page

773

End page

775

Subjects

Engineering, Electrical & Electronic

•

Engineering

•

frequency

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
NEMS  
Available on Infoscience
August 14, 2021
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/180543
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