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conference paper
A Force Sensor Using a CMOS Inverter in View of its Application in Scanning Force Microscopy
1996
9th Workshop on Micro Electro Mechanical Systems
Type
conference paper
Authors
Publication date
1996
Published in
9th Workshop on Micro Electro Mechanical Systems
Start page
447
End page
450
Peer reviewed
NON-REVIEWED
EPFL units
Available on Infoscience
May 12, 2009
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