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  4. Abnormal Grain Growth in AlScN Thin Films Induced by Complexion Formation at Crystallite Interfaces
 
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research article

Abnormal Grain Growth in AlScN Thin Films Induced by Complexion Formation at Crystallite Interfaces

Sandu, Cosmin Silviu  
•
Parsapour, Fazel  
•
Mertin, Stefan  
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January 1, 2019
Physica Status Solidi A-Applications And Materials Science

Sputter deposited Al(1-x)ScxN thin films with a Sc content from x = 0 to 43 at% are investigated by electron microscopy in order to study and explain the formation and growth of abnormally oriented grains (AOG). It is found that the latter did not nucleate at the interface with the substrate, but at high energy grain boundaries, at which systematically higher Sc concentrations are detected. The AOGs are thus formed during the growth of c-textured grains. They grow faster than those, and finally protrude from the c-textured film surface, having at their end a pyramidal shape with three facets of a hexagonal wurtzite crystal: one (0001) and two (112 over bar 0) facets. Process conditions favoring less compact grain boundaries, and lower surface diffusion across grain boundaries are thought to promote nucleation of AOGs. Finally, a 4-step growth mechanism explaining the nucleation from a Sc-rich complexion and proliferation of AOGs with increasing film thickness is proposed.

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Type
research article
DOI
10.1002/pssa.201800569
Web of Science ID

WOS:000456684300019

Author(s)
Sandu, Cosmin Silviu  
•
Parsapour, Fazel  
•
Mertin, Stefan  
•
Pashchenko, Vladimir  
•
Matloub, Ramin  
•
LaGrange, Thomas  
•
Heinz, Bernd
•
Muralt, Paul  
Date Issued

2019-01-01

Publisher

WILEY-V C H VERLAG GMBH

Published in
Physica Status Solidi A-Applications And Materials Science
Volume

216

Issue

2

Article Number

1800569

Subjects

Materials Science, Multidisciplinary

•

Physics, Applied

•

Physics, Condensed Matter

•

Materials Science

•

Physics

•

abnormal grain growth

•

aluminum nitride

•

grain boundary

•

scandium

•

thin films

•

bulk acoustic resonators

•

piezoelectric properties

•

microstructure

Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
LC  
CIME  
Available on Infoscience
February 13, 2019
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/154463
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