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research article

MEMS cantilever sensor array oscillators: Theory and experiments

Lulec, Sevil Zeynep
•
Adiyan, Ulas
•
Yaralioglu, Goksen G.
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2016
Sensors and Actuators A: Physical

This paper demonstrates that an array of cantilever sensors can be operated simultaneously at resonance using a single actuator and a single photodetector. Self-sustained oscillations (SSOs) of cantilevers can be achieved in a feed-back loop using gain saturation mechanism in the electronics. Multiple cantilevers require separate saturation mechanisms and separate sensing electronics for each channel. We introduced optical non-linearity using diffraction gratings at the tip of each cantilever which provide separate saturation non-linearity, enabling a single detector based oscillator array. Two-cantilever SSO operation is investigated analytically, and the multiple frequency oscillation criteria are established. Cross-coupling between the oscillation frequencies has been investigated by using this multi cantilever model. The proposed model will be helpful to design dynamic-mode MEMS (Micro-electro-mechanical systems) cantilever sensor arrays with the desired functionality and cross-talk levels. This multiple SSO operation can be used in conjunction with dense cantilever arrays for various biosensor applications. Moreover, the model can also be useful to understand the operation of any kind of multiple simultaneous oscillator systems, which employs a single feed-back loop. We also present experimental results that confirm our model.

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Type
research article
DOI
10.1016/j.sna.2015.11.028
Web of Science ID

WOS:000369201500018

Author(s)
Lulec, Sevil Zeynep
Adiyan, Ulas
Yaralioglu, Goksen G.
Leblebici, Yusuf  
Urey, Hakan
Date Issued

2016

Publisher

Elsevier

Published in
Sensors and Actuators A: Physical
Volume

237

Start page

147

End page

154

Subjects

Biosensors

•

MEMS cantilever sensor arrays

•

Multiple self-sustained oscillation

•

Interferometric readout

•

Diffraction grating

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

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Available on Infoscience
April 1, 2016
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/125489
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