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  4. Parylene-Based Hollow Nanomechanical Resonators For Bioapplications
 
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Parylene-Based Hollow Nanomechanical Resonators For Bioapplications

De Pastina, Annalisa  
•
Aupée, Antoine Nicolas Désiré  
•
Larsen, Tom  
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2016
42nd Micro and Nano Engineering Conference

We present the fabrication of parylene-based hollow nanomechanical resonators, following a simple two step fabrication process with a thermal budget of less than 120°C. This process is ideal for fast prototyping and compatible with most materials used in micro- and nano-fabrication. In particular, the example we present here shows a hybrid structure with silicon nitride and parylene, but we have also demonstrated compatibility with metallic electrodes and aluminum nitride piezoelectric layers.

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2016_Annalisa_De_Pastina_MNE.pdf

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