Direct Etching of High Aspect structures through a Stencil

conference paper

Direct Etching of High Aspect structures through a Stencil

•

Vazquez-Mena, O.

•

2009

Proceedings of the 22nd IEEE International Conference on Micro Electro Mechanical Systems 2009

Name

villanueva_mems_2008.pdf

Access type

openaccess

Size

2.48 MB

Format

Adobe PDF

Checksum (MD5)

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