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research article

Wafer- and piece-wise Si tip transfer technologies for applications in scanning probe microscopy

Akiyama, T.  
•
Staufer, U.
•
de Rooij, N. F.  
1999
IEEE Journal of Microelectromechanical Systems
  • Details
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Type
research article
DOI
10.1109/84.749404
Author(s)
Akiyama, T.  
•
Staufer, U.
•
de Rooij, N. F.  
Date Issued

1999

Published in
IEEE Journal of Microelectromechanical Systems
Volume

8

Issue

1

Start page

65

End page

70

Note

211

Peer reviewed

REVIEWED

Written at

OTHER

EPFL units
SAMLAB  
Available on Infoscience
May 12, 2009
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/38924
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