In this project, characterization of a series of previously fabricated Aluminium clamped-clamped micro beams and cantilevers by electrical measurements in order to investigate the effects of scaling down on mechanical properties of micro/nano structures is presented. The Young’s modulus that depends on the thickness of the microstructure, residual stress and surface properties as opposed to a constant Young’s modulus in macro scale theories was investigated. Due to insufficient sample space and high stresses during fabrication, a correlation was not obtained.