Etching of sub-micrometer structures through Stencil

conference presentation

Etching of sub-micrometer structures through Stencil

•

Vazquez-Mena, O.

•

van den Boogaart, M.A.F.

2007

33rd International Conference on Micro- and Nano Engineering 2007 (MNE 2007)

Name

Villanueva_2007_MNE.pdf

Access type

restricted

Size

412.94 KB

Format

Adobe PDF

Checksum (MD5)

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