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research article

Micromachined photoplastic probe for scanning near-field optical microscopy

Genolet, G.
•
Despont, M.
•
Vettiger, P.
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2001
Review of Scientific Instruments

We present a hybrid probe for scanning near-field optical microscopy (SNOM), which consists of a micromachined photoplastic tip with a metallic aperture at the apex that is attached to an optical fiber, thus combining the advantages of optical fiber probes and micromachined tips. The tip and aperture are batch fabricated and assembled to a preetched optical fiber with micrometer centering precision. Rectangular apertures of 50 nm X 130 nm have been produced without the need of any postprocessing. Topographical and optical imaging with a probe having an aperture of 300 nm demonstrate the great potential of the photoplastic probe for SNOM applications. © 2001 American Institute of Physics.

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Type
research article
DOI
10.1063/1.1394182
Scopus ID

2-s2.0-0035471629

Author(s)
Genolet, G.
•
Despont, M.
•
Vettiger, P.
•
Staufer, U.
•
Noell, W.  
•
de Rooij, N. F.  
•
Cueni, T.
•
Bernal, M.-P.
•
Marquis-Weible, F.
Date Issued

2001

Published in
Review of Scientific Instruments
Volume

72

Issue

10

Start page

3877

End page

3879

Note

260

Peer reviewed

REVIEWED

Written at

OTHER

EPFL units
SAMLAB  
Available on Infoscience
May 12, 2009
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/39298
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