Repository logo

Infoscience

  • English
  • French
Log In
Logo EPFL, École polytechnique fédérale de Lausanne

Infoscience

  • English
  • French
Log In
  1. Home
  2. Academic and Research Output
  3. Journal articles
  4. Toward Band n78 Shear Bulk Acoustic Resonators Using Crystalline Y-Cut Lithium Niobate Films With Spurious Suppression
 
Loading...
Thumbnail Image
research article

Toward Band n78 Shear Bulk Acoustic Resonators Using Crystalline Y-Cut Lithium Niobate Films With Spurious Suppression

Yandrapalli, Soumya  
•
Eroglu, Seniz Kucuk
•
Mateu, Jordi
Show more
June 15, 2023
Journal Of Microelectromechanical Systems

This work presents the study of suspended Y-cut Lithium Niobate shear bulk acoustic resonators for wide band filter applications in the frequency range of 3.5-4.5GHz. The resonators consist of a Lithium Niobate film with Aluminum top interdigitated electrodes (IDE) and floating bottom metal plate. Through vertical electric field excitation, shear bulk acoustic waves are generated in each unit cell of the device functioning as a quasi-independent resonator. Measured devices at 3.7GHz having large relative resonance-antiresonance bandwidth of 16.7% (750MHz), with 2 Omega impedance at resonance are presented. Suppression of higher order lateral harmonics through etching of trenches in the Lithium Niobate and geometric optimization is discussed.

  • Details
  • Metrics
Type
research article
DOI
10.1109/JMEMS.2023.3282024
Web of Science ID

WOS:001012270700001

Author(s)
Yandrapalli, Soumya  
•
Eroglu, Seniz Kucuk
•
Mateu, Jordi
•
Collado, Carlos
•
Plessky, Victor
•
Villanueva, Luis Guillermo  
Date Issued

2023-06-15

Publisher

IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC

Published in
Journal Of Microelectromechanical Systems
Subjects

Engineering, Electrical & Electronic

•

Nanoscience & Nanotechnology

•

Instruments & Instrumentation

•

Physics, Applied

•

Engineering

•

Science & Technology - Other Topics

•

Physics

•

lithium niobate

•

linbo3

•

thin films

•

piezoelectric films

•

bulk acoustic resonator (baw)

•

sh1 mode

•

shear wave

•

5g application

•

large bandwidth

•

electromechanical coupling k(t)(2)

•

electro acoustic filters

•

band n78

•

microfabrication

•

rf front-end

•

quality factor

•

frequency

Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
NEMS  
Available on Infoscience
July 17, 2023
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/199132
Logo EPFL, École polytechnique fédérale de Lausanne
  • Contact
  • infoscience@epfl.ch

  • Follow us on Facebook
  • Follow us on Instagram
  • Follow us on LinkedIn
  • Follow us on X
  • Follow us on Youtube
AccessibilityLegal noticePrivacy policyCookie settingsEnd User AgreementGet helpFeedback

Infoscience is a service managed and provided by the Library and IT Services of EPFL. © EPFL, tous droits réservés