conference paper not in proceedings

Frequency effects in silane plasmas for a-Si:H deposition

Howling, A.A.  
1992
Société Suisse de Physique
Type
conference paper not in proceedings
Author(s)
Howling, A.A.  
Date Issued

1992

Note

Société Suisse de Physique, printemps 1992

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
CRPP  
SPC  
Event name
Société Suisse de Physique
Available on Infoscience
May 13, 2008
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/24261