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  4. A comb drive actuated vertically moving micromirror for tunable mid-infrared Resonant Cavity Enhanced Detectors
 
research article

A comb drive actuated vertically moving micromirror for tunable mid-infrared Resonant Cavity Enhanced Detectors

Quack, Niels  
•
Rüst, Philipp
•
Blunier, Stefan
Show more
2009
Microelectronic Engineering

The realization of a vertically moving micromirror using electrostatic actuation in a comb drive configuration is presented. The micromirror is designed for the use in tunable mid-infrared Resonant Cavity Enhanced Detectors (RCEDs). It can be displaced more than 2.5 μm with less than 30 V actuation voltage. In addition to the pure out-of-plane movement, the mirror can be tilted by applying different voltages at the different comb drive actuators. A voltage difference of 30 V on opposite comb drive actuators induces a mirror tilt of 0.23°. Measured spectra of a tunable RCED employing the presented micromirror are included.

  • Details
  • Metrics
Type
research article
DOI
10.1016/j.mee.2008.12.064
Author(s)
Quack, Niels  
Rüst, Philipp
Blunier, Stefan
Dual, Jurg
Felder, Ferdinand
Rahim, Mohamed
Fill, Matthias
Arnold, Martin
Zogg, Hans
Date Issued

2009

Publisher

Elsevier

Published in
Microelectronic Engineering
Volume

86

Issue

4-6

Start page

1243

End page

1246

Subjects

Fabry-perot

•

IR-detector

•

MEMS

•

Micromirror

•

Microspectrometer

•

Mid-infrared

•

RCED

•

Tunable

Note

Part of special issue: MNE ’08: The 34th International Conference on Micro- and Nano-Engineering (MNE)

Editorial or Peer reviewed

REVIEWED

Written at

OTHER

EPFL units
GR-QUA  
Available on Infoscience
July 7, 2015
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/115913
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