Freestanding Silicon Photonic Ring and Disk Resonators
We report freestanding silicon photonic ring and disk resonators fabricated in a simplified silicon photonics process based on IMEC's iSiPP5OG standard platform that have been released by a custom MEMS post-processing step. Experimental results show high optical Q-factors up to 3.6x10(4) for both ring and disk resonators, and extinction ratios larger than 20 dB. These functional, freestanding resonators demonstrate the compatibility of MEMS processing within a silicon photonics platform and open the possibility for large-scale integration of more complex photonic devices.
WOS:000522410000092
2019-01-01
978-1-7281-4503-7
New York
International Conference on Optical MEMS and Nanophotonics
212
213
REVIEWED
Event name | Event place | Event date |
Daejeon, SOUTH KOREA | Jul 28-Aug 01, 2019 | |