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research article

Which PZT thin films for piezoelectric microactuator applications?

Dubois, M. A.
•
Muralt, P.  
•
Taylor, D. V.
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1998
Integrated Ferroelectrics

The effective piezoelectric coefficient e(31) has been measured on sol-gel processed Pb(ZrxTi1-x)O-3 thin films with Zr concentrations ranging from 45 to 60%. The largest value was observed at 45% Zr, although dielectric constant and effective d(33) peak at 53% Zr. The findings suggest that the optimal composition for microactuators and sensors is less than 45% Zr, i.e., in the tetragonal part of the phase diagram.

  • Details
  • Metrics
Type
research article
DOI
10.1080/10584589808208072
Web of Science ID

WOS:000076544300050

Author(s)
Dubois, M. A.
Muralt, P.  
Taylor, D. V.
Hiboux, S.
Date Issued

1998

Published in
Integrated Ferroelectrics
Volume

22

Issue

1-4

Start page

1055

End page

1063

Subjects

piezoelectricity

•

ferroelectricity

•

thin films

•

sensors

Note

Dubois, Ma Swiss Fed Inst Technol, Lab Ceram, CH-1015 Lausanne, Switzerland Swiss Fed Inst Technol, Lab Ceram, CH-1015 Lausanne, Switzerland

130WX

Cited References Count:17

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
LC  
Available on Infoscience
August 21, 2006
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/233328
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