Loading...
conference paper
Parallel atomic force microscopy using optical heterodyne detection
2006
MEMS, MOEMS, and Micromachining II
Type
conference paper
Authors
•
•
Manzardo, O.
•
•
Aeschimann, L.
•
Staufer, U.
•
Vettiger, P.
•
Weible, K.
•
Publication date
2006
Published in
MEMS, MOEMS, and Micromachining II
Series title/Series vol.
Proc. SPIE; 6186
Start page
61860B
Written at
OTHER
EPFL units
Available on Infoscience
April 22, 2009
Use this identifier to reference this record