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conference proceedings

Lithographic and Micromachining Techniques for Optical Component Fabrication

Kley, Ernst-Bernhard
•
Herzig, Hans Peter  
2001
Lithographic and Micromachining Techniques for Optical Component Fabrication
  • Details
  • Metrics
Type
conference proceedings
ISBN

0-8194-4154-6

Editors
Kley, Ernst-Bernhard
•
Herzig, Hans Peter  
Date Issued

2001

Publisher

SPIE

Publisher place

Bellingham, Washington

Series title/Series vol.

Proceedings of SPIE; 4440

Written at

EPFL

EPFL units
OPT  
Event nameEvent placeEvent date
Lithographic and Micromachining Techniques for Optical Component Fabrication

San Diego, CA, USA

July 29-30, 2001

Available on Infoscience
May 26, 2016
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/126326
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