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  4. High reflectivity airgap distributed Bragg reflectors realized by wet etching of AlInN sacrificial layers
 
research article

High reflectivity airgap distributed Bragg reflectors realized by wet etching of AlInN sacrificial layers

Altoukhov, A.  
•
Levrat, J.  
•
Feltin, E.
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2009
Applied Physics Letters

The authors report on the achievement of a vertically oriented three pair airgap/GaN distributed Bragg reflector realized by controlled oxidation and wet-chemical etching of AlInN sacrificial layers. Microreflectivity measurements exhibit high peak reflectivity values of 87% around 500 nm after the oxidation process and 90% around 600 nm after the etching process ill overall good agreement with simulations. The broad stopband of airgap/GaN mirrors, about 250 nm wide. results from the strong refractive index contrast between air and GaN layers. (C) 2009 American Institute of Physics. [doi: 10.1063/1.3259720]

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Type
research article
DOI
10.1063/1.3259720
Web of Science ID

WOS:000272756600002

Author(s)
Altoukhov, A.  
•
Levrat, J.  
•
Feltin, E.
•
Carlin, J. F.  
•
Castiglia, A.  
•
Butte, R.  
•
Grandjean, N.  
Date Issued

2009

Published in
Applied Physics Letters
Volume

95

Issue

19

Article Number

1102

Subjects

III-NITRIDE

•

HETEROSTRUCTURES

•

MICROCAVITIES

•

TECHNOLOGY

•

DIODES

•

MEMS

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
LASPE  
Available on Infoscience
October 5, 2010
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/55026
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