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  4. Foil-level fabrication of inkjet-printed pyroMEMS balloon actuators
 
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conference paper

Foil-level fabrication of inkjet-printed pyroMEMS balloon actuators

de Koninck, D. A.  
•
Molina Lopez, F.
•
Briand, D.  
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2012
2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS)
2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS)

The fabrication, modeling and testing of a pyroMEMS balloon actuators are presented herein. A foil-level fabrication method was developed, integrating nickel-plated, inkjet-printed igniters capable of generating >200 degrees C for similar to 1 s-sufficient for fuel combustion-and a low-temperature (120 degrees C) lamination technique using thick photodefinable epoxy sheets. Two different fuel mixtures and three different chamber volumes were tested. Balloon actuators (5 mm dia.) were successfully inflated, reaching over 5 mm in height. Maximum balloon heights were in good agreement with the semi-analytical model developed (28-35 % over prediction).

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Type
conference paper
DOI
10.1109/MEMSYS.2012.6170094
Web of Science ID

WOS:000312912800017

Author(s)
de Koninck, D. A.  
•
Molina Lopez, F.
•
Briand, D.  
•
de Rooij, N. F.  
Date Issued

2012

Publisher

IEEE

Publisher place

New York

Published in
2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS)
ISBN of the book

978-1-4673-0325-5

Total of pages

4

Series title/Series vol.

Proceedings IEEE Micro Electro Mechanical Systems

Start page

64

End page

67

Peer reviewed

NON-REVIEWED

Written at

EPFL

EPFL units
SAMLAB  
Event nameEvent placeEvent date
2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS)

Paris, France

January 29-February 02, 2012

Available on Infoscience
April 2, 2012
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/79139
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