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research article
Surface-micromachined Ta-Si-N beams for use in micromechanics
Type
research article
Author(s)
Date Issued
1998
Published in
Volume
8
Issue
2
Start page
88
End page
90
Note
183
Peer reviewed
REVIEWED
Written at
OTHER
EPFL units
Available on Infoscience
May 12, 2009
Use this identifier to reference this record