book part or chapter
Atomic dynamics during silicon oxidation
2001
Fundamental Aspects of Silicon Oxidation
Type
book part or chapter
Author(s)
Date Issued
2001
Published in
Fundamental Aspects of Silicon Oxidation
Start page
107
End page
125
Series title/Series vol.
Springer Series in Materials Science; 46
Editorial or Peer reviewed
REVIEWED
Written at
EPFL
EPFL units
Available on Infoscience
October 8, 2009
Use this identifier to reference this record