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  4. Transversal Spurious Mode Suppression in Ultra-Large-Coupling SH0 Acoustic Resonators on YX36 degrees-Cut Lithium Niobate
 
research article

Transversal Spurious Mode Suppression in Ultra-Large-Coupling SH0 Acoustic Resonators on YX36 degrees-Cut Lithium Niobate

Stettler, Silvan  
•
Villanueva, Luis Guillermo  
March 30, 2023
Journal Of Microelectromechanical Systems

This work reports on the design and fabrication of fundamental shear horizontal (SH0) mode acoustic resonators based on a suspended lithium niobate (LNO) film at 1.04 GHz. Due to the large e16 piezoelectric coefficient of YX36 degrees.-cut LNO, fabricated devices exhibit ultra-large effective electromechanical coupling ( k(2)e f f) as high as 29% with a loaded quality factor of 500 at resonance. Moreover, improved device designs with suppressed spurious mode responses are developed based on analysis of the dispersion relation of the SH0 mode in the suspended film. By adding a low-velocity region at the transducer edge and perforations in the inactive area, a spurious-free response is obtained without any reduction in k(2)e f f. In combination with the ability to tune the resonance frequency lithographically, the demonstrated devices are promising for wide-band or tunable radio frequency (RF) filters. [2023-0008]

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Type
research article
DOI
10.1109/JMEMS.2023.3262021
Web of Science ID

WOS:000966849700001

Author(s)
Stettler, Silvan  
Villanueva, Luis Guillermo  
Date Issued

2023-03-30

Publisher

IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC

Published in
Journal Of Microelectromechanical Systems
Subjects

Engineering, Electrical & Electronic

•

Nanoscience & Nanotechnology

•

Instruments & Instrumentation

•

Physics, Applied

•

Engineering

•

Science & Technology - Other Topics

•

Physics

•

resonators

•

electrodes

•

resonant frequency

•

couplings

•

stress

•

dispersion

•

surface acoustic waves

•

lithium niobate

•

thin films

•

piezoelectric

•

shear horizontal mode

•

sh0

•

electromechanical coupling

•

spurious mode

•

piston mode

•

plate wave

•

rf mems

•

mems resonators

•

resonance suppression

Note

accepted version

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

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Available on Infoscience
September 4, 2024
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/197313.2
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