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conference presentation

Micro- and nano-patterning using local deposition through miniaturized shadow mask

Kim, G M 
•
Brugger, J 
2003
5th Korean MEMS Conference

not available

Type
conference presentation
Authors
Kim, G M 
•
Brugger, J 
Publication date

2003

EPFL units
LMIS1 
Event nameEvent placeEvent date
5th Korean MEMS Conference

Jeju, Korea

15-17 May, 2003

Available on Infoscience
March 2, 2007
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/3389