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research article
Micro-electromechanical systems for nanoscience
Type
research article
Authors
Staufer, U.
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•
Beuret, C.
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•
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Schürmann, G.
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Stebler, C.
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Publication date
2000
Published in
Volume
2
Start page
413
End page
418
Note
234
Peer reviewed
REVIEWED
EPFL units
Available on Infoscience
May 12, 2009
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