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research article

SU-8 as a Material for Microfabricated Particle Physics Detectors

Maoddi, Pietro  
•
Mapelli, Alessandro  
•
Jiguet, Sebastien
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2014
Micromachines

Several recent detector technologies developed for particle physics applications are based on microfabricated structures. Detectors built with this approach generally exhibit the overall best performance in terms of spatial and time resolution. Many properties of the SU-8 photoepoxy make it suitable for the manufacturing of microstructured particle detectors. This article aims to review some emerging detector technologies making use of SU-8 microstructuring, namely micropattern gaseous detectors and microfluidic scintillation detectors. The general working principle and main process steps for the fabrication of each device are reported, with a focus on the advantages brought to the device functionality by the use of SU-8. A novel process based on multiple bonding steps for the fabrication of thin multilayer microfluidic scintillation detectors developed by the authors is presented. Finally, a brief overview of the applications for the discussed devices is given.

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Type
research article
DOI
10.3390/mi5030594
Web of Science ID

WOS:000343094500016

Author(s)
Maoddi, Pietro  
Mapelli, Alessandro  
Jiguet, Sebastien
Renaud, Philippe  
Date Issued

2014

Publisher

MDPI

Published in
Micromachines
Volume

5

Issue

3

Start page

594

End page

606

Subjects

SU-8

•

particle detectors

•

micropattern gaseous detectors

•

Micromegas

•

microfluidics

•

scintillation detectors

•

microfluidic scintillation detectors

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
LMIS4  
Available on Infoscience
August 27, 2014
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/106064
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