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conference paper

A high insulating thin film ZnO piezoelectric actuator on a Polyimide substrate

Kuoni, A.
•
Quinche, C.
•
Boillat, M.
more
2002
The 16th European Conference on Solid-State Transducers
Type
conference paper
Authors
Kuoni, A.
•
Quinche, C.
•
Boillat, M.
•
Keppner, H.
•
de Rooij, N. F. 
Publication date

2002

Published in
The 16th European Conference on Solid-State Transducers
Peer reviewed

NON-REVIEWED

EPFL units
SAMLAB 
Available on Infoscience
May 12, 2009
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/39515