Loading...
1990
Thin-Film Sputter Deposition for Hybrid Applications
research article
Type
research article
Author(s)
Date Issued
1990
Published in
Volume
41
Issue
4-6
Start page
1400
End page
1402
Note
Muralt, P Balzers Ag,Proc & Equipment Labs,Ch-9496 Balzers,Switzerland
Ee547
Cited References Count:3
Peer reviewed
REVIEWED
Written at
EPFL
EPFL units
Available on Infoscience
August 21, 2006
Use this identifier to reference this record