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research article
Generation of Various Complex Patterned Structures From a Single Ellipsoidal Dot Prepattern by Capillary Force Lithography
2007
Creating many different complex structures from a single prepattern is achieved from either a master mold or stamping onto a solid substrate by patterning with a PDMS replica mold. Various metal patterns including ellipses, dots, rings, chains of dots (or rings), ribbons and wavy lines with various feature sizes can be generated from a single pattern of isolated ellipsoidal dots by simply varying the residual polymer film thickness and the reactive ion etching (RIE) time.
Type
research article
Authors
Publication date
2007
Published in
Volume
19
Issue
24
Start page
4392
End page
4398
Peer reviewed
REVIEWED
Written at
OTHER
EPFL units
Available on Infoscience
June 6, 2011
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