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conference paper
Engineering of thin film crystallinity for wear resistant coatings using a combination of PECVD and PVD plasma technology
2007
CTI Day
Type
conference paper
Authors
Neels, A.
•
Dommann, A.
•
Ibzazene, A.
•
Suter, M.
•
Döbeli, M.
•
Ante, M.
•
Ramm, J.
Publication date
2007
Published in
CTI Day
Peer reviewed
NON-REVIEWED
Written at
OTHER
EPFL units
Available on Infoscience
May 12, 2009
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