conference paper
MOLPCVD of Ta2O5 using TaC12H30O5N as Precursor for Batch Fabrication
2003
203rd Electrochemical Society Meeting
Type
conference paper
Author(s)
•
Mondin, G.
•
Jenny, S.
•
Banakh, O.
•
•
Jeanneret, S.
•
Keppner, H.
•
Date Issued
2003
Published in
203rd Electrochemical Society Meeting
Volume
2
Start page
790
End page
797
Editorial or Peer reviewed
NON-REVIEWED
Written at
OTHER
EPFL units
Available on Infoscience
May 12, 2009
Use this identifier to reference this record