conference paper
MOLPCVD of Ta2O5 using TaC12H30O5N as Precursor for Batch Fabrication
2003
203rd Electrochemical Society Meeting
Type
conference paper
Author(s)
Mondin, G.
Jenny, S.
Banakh, O.
Jeanneret, S.
Keppner, H.
Date Issued
2003
Published in
203rd Electrochemical Society Meeting
Volume
2
Start page
790
End page
797
Editorial or Peer reviewed
NON-REVIEWED
Written at
OTHER
EPFL units
Available on Infoscience
May 12, 2009
Use this identifier to reference this record