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research article

Fabrication of three-dimensional microlens arrays in sol-gel glass

Orhan, J.-B. 
•
Parashar, V.K. 
•
Sayah, A. 
more
2006
Microelectronic Engineering
Type
research article
DOI
10.1016/j.mee.2006.01.045
Web of Science ID

WOS:000237581900170

Authors
Orhan, J.-B. 
•
Parashar, V.K. 
•
Sayah, A. 
•
Gijs, M.A.M. 
Publication date

2006

Published in
Microelectronic Engineering
Volume

83

Issue

4-9

Start page

1329

End page

1332

Peer reviewed

REVIEWED

EPFL units
LMIS2 
Available on Infoscience
August 18, 2006
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/233094