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  4. Integration of Ultra-Low Volume Pneumatic Microfluidics with a Three-Dimensional Electrode Network for On-Chip Biochemical Sensing
 
research article

Integration of Ultra-Low Volume Pneumatic Microfluidics with a Three-Dimensional Electrode Network for On-Chip Biochemical Sensing

Tomar, Saurabh
•
Lasne, Charlotte
•
Barraud, Sylvain
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June 28, 2021
Micromachines

This paper reports a novel miniaturized pseudo reference electrode (RE) design for biasing Ion Sensitive Field Effect Transistors (ISFETs). It eliminates the need for post-CMOS processing and can scale up in numbers with the CMOS scaling. The presented design employs silane-mediated transfer of patterned gold electrode lines onto PDMS microfluidics such that the gold conformally coats the inside of microfluidic channel. Access to this electrode network is made possible by using “through-PDMS-vias” (TPV), which consist of high metal-coated SU-8 pillars manufactured by a novel process that employs a patterned positive resist layer as SU-8 adhesion depressor. When integrated with pneumatic valves, TPV and pseudo-RE network were able to bias 1.5 nanoliters (nL) of isolated electrolyte volumes. We present a detailed characterization of our pseudo-RE design demonstrating ISFET operation and its DC characterization. The stability of pseudo-RE is investigated by measuring open circuit potential (OCP) against a commercial Ag/AgCl reference electrode.

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Type
research article
DOI
10.3390/mi12070762
Author(s)
Tomar, Saurabh
Lasne, Charlotte
Barraud, Sylvain
Ernst, Thomas
Guiducci, Carlotta
Date Issued

2021-06-28

Published in
Micromachines
Volume

12

Issue

7

Start page

762

Subjects

SU-8

•

reference electrode

•

packaging

•

PDMS

•

microfluidics

•

ISFET

•

post-CMOS processing

•

pneumatic valves

•

flexible electronics

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

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October 22, 2021
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/182383
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