conference paper
Novel Technique for Nanograin Ultra-Thin Polysilicon Film Deposition and Implantation
2003
2003 International Semiconductor Conference. CAS 2003 Proceedings
Type
conference paper
Web of Science ID
WOS:000189468100007
Author(s)
Date Issued
2003
Published in
2003 International Semiconductor Conference. CAS 2003 Proceedings
Volume
1
Start page
47
End page
50
Editorial or Peer reviewed
NON-REVIEWED
Written at
EPFL
EPFL units
Available on Infoscience
October 10, 2007
Use this identifier to reference this record