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research article

Electrochemical Micromachining of Titanium through a Laser Patterned Oxide Film

Chauvy, P.-F.
•
Hoffmann, P.  
•
Landolt, D.
2001
Electrochemical and Solid-State Letters

Selective dissolution of titanium through a laser patterned oxide film has been achieved in a 3M sulfuric acid-methanol electrolyte. The 250 nm thick oxide film was formed anodically on a flat titanium surface in 0.5 M sulfuric acid. The patterning of the film was obtained by local irradiation using a long pulse XeCl eximer laser. Electrochemical dissolution at irradiated lines on the oxide film yielded well-defined grooves comparable to those resulting from electrochemical micromachining through a photoresist mask. The described process permits electrochemical micromachining of titanium without photoresist and thus can lead to new applications of this technique.

  • Details
  • Metrics
Type
research article
DOI
10.1149/1.1359057
Web of Science ID

WOS:000167877200008

Author(s)
Chauvy, P.-F.
Hoffmann, P.  
Landolt, D.
Date Issued

2001

Published in
Electrochemical and Solid-State Letters
Volume

4

Issue

5

Start page

C31

End page

C34

Subjects

[NRG]

URL

URL

\\Atlantis\MAD\MAD public\Publi Present Conferences\Publications\printed papers\2001 : NRG Chauvy ECSSL 2001 60
Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
LOA  
Available on Infoscience
July 20, 2009
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/41706
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