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  4. Tunable Resonant Cavity Enhanced Detectors using Vertical MEMS Mirrors
 
conference paper

Tunable Resonant Cavity Enhanced Detectors using Vertical MEMS Mirrors

Quack, Niels  
•
Blunier, Stefan
•
Dual, Jurg
Show more
2007
2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics
2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics

Highly sensitive photodetectors for the mid infrared have been obtained by placing a photodiode inside a Fabry Perot cavity. These resonant cavity enhanced detectors (RCED) are sensitive at the resonances only, which depend on the distance between the two mirrors of the cavity. Displacing one of these mirrors allows changing the cavity length and thus selecting the detection wavelength. The design, simulation and fabrication of a MEMS mirror and its integration with the counter mirror and the photodiode grown by molecular beam epitaxy are presented. First results with external mirrors moved by piezoactuation are described, too.

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Type
conference paper
DOI
10.1109/OMEMS.2007.4373892
Author(s)
Quack, Niels  
Blunier, Stefan
Dual, Jurg
Arnold, Martin
Felder, Ferdinand
Ebneter, Christian
Rahim, Mohamed
Zogg, Hans
Date Issued

2007

Publisher

IEEE

Published in
2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics
Start page

165

End page

166

Editorial or Peer reviewed

REVIEWED

Written at

OTHER

EPFL units
GR-QUA  
Event nameEvent placeEvent date
2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics

Hualien, Taiwan

July 16 - august 12, 2007

Available on Infoscience
July 9, 2015
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/116200
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