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conference paper
MOEMS thermal imaging camera
2008
Prime: 2008 Phd Research In Microelectronics And Electronics, Proceedings
A novel thermo-mechanical Infrared (IR) imaging array with integrated diffraction gratings for optical readout was fabricated and tested. Parylene was used as a structural material for its low thermal conductivity and high thermal expansion properties. Tests were performed using an IR blackbody target and first order diffracted light was imaged on a CCD camera to monitor the entire array. Results show that it is possible to achieve <100mK NETD using a 12 bit CCD camera.
Type
conference paper
Authors
Publication date
2008
Published in
Prime: 2008 Phd Research In Microelectronics And Electronics, Proceedings
Start page
101
End page
104
Peer reviewed
NON-REVIEWED
EPFL units
Event name | Event place | Event date |
Istanbul, TURKEY | Jun 22-25, 2008 | |
Available on Infoscience
January 21, 2011
Use this identifier to reference this record